Details for: Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 / › Matheson Library catalog

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Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 / editor, G.W. Rubloff.

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Material type: Text

Text

TextSeries: American Vacuum Society series ; 4 | AIP conference proceedings ; no. 167.Publication details: New York : American Institute of Physics, 1988.Description: 388 p. : illISBN:

0883183676

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	Matheson Library Main Collection	Main Collection	621.381 D422 (Browse shelf(Opens below))	Available		072417

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