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Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 /

Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 / editor, G.W. Rubloff. - New York : American Institute of Physics, 1988. - 388 p. : ill. - American Vacuum Society series ; 4 . - American Institute of Physics conference proceedings ; no. 167 . - AIP conference proceedings. no. 167. .

0883183676

90011068


Thin films.
Microelectronics--Materials.