Deposition and growth : limits for microelectronics, Anaheim, CA, 1987 / editor, G.W. Rubloff.
Material type: TextSeries: American Vacuum Society series ; 4 | AIP conference proceedings ; no. 167.Publication details: New York : American Institute of Physics, 1988.Description: 388 p. : illISBN:- 0883183676
Item type | Current library | Collection | Call number | Status | Date due | Barcode | |
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Books | Matheson Library Main Collection | Main Collection | 621.381 D422 (Browse shelf(Opens below)) | Available | 072417 |
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