| 000 | 00849nam a2200265u 4500 | ||
|---|---|---|---|
| 001 | 00851523 | ||
| 003 | PWmBRO | ||
| 005 | 20240602101941.0 | ||
| 008 | 880603s1988 nyua b 10100 eng | ||
| 010 | _a90011068 | ||
| 020 | _a0883183676 | ||
| 090 | 0 | _b621.3/81/D422 | |
| 245 | 0 | 0 |
_aDeposition and growth : _blimits for microelectronics, Anaheim, CA, 1987 / _ceditor, G.W. Rubloff. |
| 260 | 0 |
_aNew York : _bAmerican Institute of Physics, _c1988. |
|
| 300 |
_a388 p. : _bill. |
||
| 440 | 0 |
_aAmerican Vacuum Society series ; _v4 |
|
| 490 | 1 |
_aAmerican Institute of Physics conference proceedings ; _vno. 167 |
|
| 650 | 0 | _aThin films. | |
| 650 | 0 |
_aMicroelectronics _xMaterials. |
|
| 700 | 1 | 0 | _aRubloff, G. W. |
| 710 | 2 | 0 | _aAmerican Institute of Physics. |
| 830 | 0 |
_aAIP conference proceedings. _vno. 167. |
|
| 942 | _2ddc | ||
| 994 | 0 | 1 | _a072417 |
| 999 |
_c50918 _d50918 |
||