| 000 | 01181nam a2200313u 4500 | ||
|---|---|---|---|
| 001 | 00826332 | ||
| 003 | PWmBRO | ||
| 005 | 20240602101711.0 | ||
| 008 | 860117s1986 nyua b 10100 eng | ||
| 010 | _a 55051485 | ||
| 020 | _a0883183374 | ||
| 050 | 0 |
_aTK7871.85 _b.F76 1986 |
|
| 082 | 0 | _a621.3815/2�19 | |
| 090 | 0 | _a621.381/52/F935 | |
| 245 | 0 | 0 |
_aFrontiers in electronic materials & processing : _bHouston, Texas, November 1985 / _ceditor, L.J. Brillson. |
| 260 | 0 |
_aNew York : _bAmerican Institute of Physics, _c1986. |
|
| 300 |
_a338 p. : _bill. ; _c25 cm. |
||
| 440 | 0 |
_aAmerican Vacuum Society series ; _v1 |
|
| 490 | 1 |
_aAmerican Institute of Physics conference proceedings ; _vno. 138 |
|
| 500 | _aProceedings of the Frontiers in Electronic Materials and Processing Conference held Nov. 19-21, 1985. | ||
| 650 | 0 | _aMicroelectronics. | |
| 650 | 0 | _aSemiconductors | |
| 700 | 1 | 0 | _aBrillson, L. J. |
| 711 | 2 | 0 |
_aFrontiers in Electronic Materials and Processing Conference _d(1985 : _cHouston, Tex.) |
| 740 | 0 | 1 | _aFrontiers in electronic materials and processing. |
| 830 | 0 |
_aAIP conference proceedings. _vno. 138. |
|
| 942 | _2ddc | ||
| 994 | 0 | 1 | _aT1001 066 572 |
| 999 |
_c46638 _d46638 |
||