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Introduction to microlithography : theory, materials, and processing / L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.

Contributor(s): Material type: TextTextSeries: ACS symposium series ; 219Publication details: Washington, D.C. : The Society, 1983.Description: ix, 363 p. : illISBN:
  • 0841207755
Subject(s): DDC classification:
  • 686.2/315�19
LOC classification:
  • TR940 .I57 1983
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Holdings
Item type Current library Collection Call number Status Date due Barcode
Books Books Matheson Library Main Collection Main Collection 686.2315 I61 (Browse shelf(Opens below)) Available 047856

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