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Microlithography : process technology for IC fabrication / David J. Elliott.

By:

Elliott, David J

Material type: Text

Text

TextPublication details: New York : McGraw-Hill, c1986.Description: xix, 378 p. : illISBN:

0070193045 :

Subject(s):

DDC classification:

621.381/73�19

LOC classification:

TK7874 .E495 1986

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Holdings ( 1 )
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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode
Books	Matheson Library Main Collection	Main Collection	621.38173 E46m (Browse shelf(Opens below))	Available		060171

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