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Sputtering by particle bombardment III : characteristics of sputtered particles, technical applicationsm / edited by R. Behrisch and K. Wittmaack.

Contributor(s): Material type: TextTextSeries: Topics in applied physics ; 64Publication details: Berlin : Springer-Verlag, c1991.Description: xii, 410 p. : illISBN:
  • 3540534288
Subject(s):
Contents:
1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.
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Item type Current library Collection Call number Status Date due Barcode
Books Books Matheson Library Main Collection Main Collection 530.41 S772 (Browse shelf(Opens below)) 127 092490

1. Physical sputtering of single-element solids -- 2. Sputtering of alloys and compounds, electron and neutron sputtering, surface topography -- 3. Characteristics of sputtered particles, technical applications.

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