TY  - BOOK
AU  - Till,William C.
AU  - Luxon,James T.
TI  - Integrated circuits: materials, devices, and fabrication
U1  - 621.381 
PY  - 1982///
CY  - Englewood Cliffs, N.J.
PB  - Prentice-Hall
KW  - Microelectronics
KW  - Integrated circuits
ER  -