TY  - BOOK
AU  - Rubloff,G.W.
ED  - American Institute of Physics.
TI  - Deposition and growth: limits for microelectronics, Anaheim, CA, 1987 
T2  - American Institute of Physics conference proceedings
SN  - 0883183676
PY  - 1988///
CY  - New York
PB  - American Institute of Physics
KW  - Thin films
KW  - Microelectronics
KW  - Materials
ER  -