Introduction to microlithography :  theory, materials, and processing / 
L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983. 
 - Washington, D.C. :  The Society,  1983. 
 - ix, 363 p. :  ill. 
 - ACS symposium series ;  219 .
<br/><br/><label>ISBN: </label>0841207755 
<br/><br/><label>Subjects--Topical Terms: </label><br/>Microlithography.<br/>Photoresists.<br/>Plasma etching.
<br/><br/><label>LC Class. No.: </label>TR940  / .I57 1983 
<br/><br/><label>Dewey Class. No.: </label>686.2/315�19