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Microlithography : process technology for IC fabrication / David J. Elliott.

By: Material type: TextTextPublication details: New York : McGraw-Hill, c1986.Description: xix, 378 p. : illISBN:
  • 0070193045 :
Subject(s): DDC classification:
  • 621.381/73�19
LOC classification:
  • TK7874 .E495 1986
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