Introduction to microlithography : theory, materials, and processing /
Introduction to microlithography : theory, materials, and processing /
L.F. Thompson, editor, C.G. Willson, editor, M.J. Bowden, editor ; based on a workshop sponsored by the ACS Division of Organic Coatings and Plastics Chemistry at the 185th Meeting of the American Chemical Society, Seattle, Washington, March 20-25, 1983.
- Washington, D.C. : The Society, 1983.
- ix, 363 p. : ill.
- ACS symposium series ; 219 .
0841207755
Microlithography.
Photoresists.
Plasma etching.
TR940 / .I57 1983
686.2/315�19
0841207755
Microlithography.
Photoresists.
Plasma etching.
TR940 / .I57 1983
686.2/315�19